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National Institute of Allergy and Infectious Disease
NIH 3D
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NIH3D

UV Lithography Mask Holder

Created by
feriousfabrious
Created:
10/20/17
Submitted:
3/6/23
Published:
3/6/23
UV Lithography Mask Holder-V2_4_NIH3D.

Select an image below to view

3DPX-008167

Licensing:

CC-BY-NC
How to cite this NIH 3D entry
132
3
Version 2

Category

Hardware & Devices
Devices and Hardware
Description

Mask Holder for UV lithography off the clean room facility, to be mounted on a microscope, and after alignment, wafer can be fixed to the holder. Fixed pieces together can be placed in a tabletop UV chamber and exposure dose can be illuminated.     

Source Data Details
3D Printing Instructions